DN16CF 316LN, Quartz viewport, EUV quality
803,00 € ex. VAT
Available on back-order
Product description
DN16CF Flange (AISI 316LN) with Viewport in EUV QualityParallelism: < 10 Arc SecondsFlatness: λ/4@632nm Transmitted WavefrontSurface Finish: 20/10 Scratch-DigThermal Range: -100°C - 200°CMaterial: Corning HPFS 7980 Excimer Grade Fused SilicaTransmission: > 99,5%@193nm(Internal)Homogeneity: Grade AInclusion Class: 0Magnetic Permeability: (μr < 1.01)Use annealed copper gaskets
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