DN100CF Miniax, Z-100mm, X&Y +/-12.5mm, 4 ports
$7,615.00 ex. VAT
Product description
DN40CF XYZ MANIPULATOR, 100mm Z TRAVEL
Motion in Vacuum
• XY travel of ±12.5 mm guided with cross roller bearings.
• Bakeable to 200°C.
• Travelling flange 38m OD (DN40CF) with M6 tapped holes, straddled about the Y axis, 4 x DN16CF Service ports
• Base flange is DN100CF
• Double bolt holes on mounting flange.
• Operating pressure 1 bar to 10-11 mbar
• Leak rate 1×10-10 mbar ls-1
• XY Resolution 0.001 mm repeatability 0.005 mm
• Z Resolution 0.005 mm repeatability 0.010 mm
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