DN63CF 316LN viewport, EUV Fused Silica
$2,900.00
Available on back-order
Available on back-order
Product description
DN63CF non-magnetic viewing window, Fused Sililca (quartz) in EUV quality,
Material Corning HPFS 7980 Excimer Grade Fused Silica
degree of homogeneity A
inclusion class 0
parallelism < 10 arc seconds
flatness λ/4@632nm
Polish 20/10 Scratch-Dig
Transmission >99.5%@193nm (internal)
Magnetic permeability μ < 1.01
viewing diameter 68mm
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| Flange Type | |
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| Min. Operating Temperature (°C) | |
| Max. Operating Temperature (°C) | |
| Magnetic | |
| Part Type | |
| Viewport Diameter (mm) | |
| Viewport Material | |
| Coating | |
| Transmitted Wavefront Distortion (TWD) | |
| Polish | |
| Parallelism | |
| Inclusions | |
| Homogeneity |
