ZXYZ1015

DN40CF XYZ MANIPULATOR, 100mm Z TRAVELMotion in Vacuum• XY travel of ±12.5 mm guided with cross roller bearings.• Bakeable to 200°C.• Travelling flange 38m OD (DN40CF) with M6 tapped holes, straddled about the Y axis, 4 x DN16CF Service ports• Base flange is DN100CF• Double bolt holes on mounting flange.• Operating pressure 1 bar to 10-11 mbar• Leak rate 1×10-10 mbar ls-1• XY Resolution 0.001 mm repeatability 0.005 mm• Z Resolution 0.005 mm repeatability 0.010 mm